The metal organic deposition(MOD) of YBa_2Cu_3O_(7-x)(YBCO) using metal trifluoroacetate(TFA) precursor is considered to be a strong candidate as a low-cost fabrication process in coated conductors.
三氟乙酸盐-金属有机沉积技术(TFA-MOD)是制备钇钡铜氧涂层导体的有发展前景的方法之一。
In order to compare each other,one antenna pattern was fabricated from gold thin film,and a second pattern was fabricated from YBa2Cu3O7-x(YBCO)superconducting thin film.
为了比较,一个天线采用金膜制造,另一个采用超导薄膜钇钡铜氧(YBCO)制造。
The laser assisted chemical etching was proposed to apply in the etching of YBCO high temperature superconductor film.
提出了将激光辅助化学刻蚀技术应用于钇钡铜氧(YBCO)高温超导薄膜的刻蚀,研究了无掩膜YBCO薄膜激光化学刻蚀的表面特性及其变化规律,在激光辐照下,YBCO薄膜的液相刻蚀速率大大加快,并且在整个过程中,刻蚀速率呈现加快趋势,这一特性将有可能用于改善YBCO刻蚀中的横向钻蚀情况,并提高图形边缘的侧壁陡峭度。
