Two kinds of sensors were designed: silicon membrane wind speed and direction sensor,and silicon cantilever wind speed and direction sensor.
设计了两种基于MEMS工艺的固态测风传感器,即硅薄膜式测风传感器和硅悬梁式测风传感器,用流体力学原理对这两种风速风向传感器进行了理论分析及ANSYS CFD软件模拟仿真,得出了风速与挠度、剪切力的关系。
Two kinds of sensors were designed:silicon membrane wind speed and direction sensor,and silicon cantilever wind speed and direction sensor.
设计了两种基于 MEMS 工艺的固态测风传感器,即硅薄膜式测风传感器和硅悬梁式测风传感器,用流体力学原理对这两种风速风向传感器进行了理论分析及 ANSYS CFD 软件模拟仿真,得出了风速与挠度、剪切力的关系。
本网站所收集内容来自网友分享仅供参考,实际请以各学校实际公布信息为主!内容侵权及错误投诉:1553292129@qq.com
CopyRight © 2020-2024 优校网[www.youxiaow.com]版权所有 All Rights Reserved. ICP备案号:浙ICP备2024058711号