Modeling low pre s sure, high density plasma etching is hig hly significant for high density plasma etching processing research.
低气压、高密度等离子体刻蚀轮廓的数值研究对于研究高密度等离子体刻蚀工艺具有重要意义。
The as grown, ZnO films annealed after growth and annealed during growth(denoted as S1, S2 and S3, respectively) were grown on C plane sapphire substrate by plasma enhanced MOCVD and characterized by XRD and X ray photoelectron energy spectra.
利用等离子体增强型MOCVD设备 ,在C面蓝宝石上生长出了C轴取向的未退火、生长后一次退火和生长过程中多次退火的ZnO薄膜样品 ,并通过X光衍射和X光电子能谱对样品进行了表征 ,结果表明生长过程中多次退火的样品具有较高的质量 ,O/Zn原子比较大 ,且受空气中氧和水汽的影响最小。
NUMERICAL STUDIES ON ETCH PROFILES IN HIGH-DENSITY PLASMA;
高密度等离子体刻蚀轮廓的数值研究
A Study on Molybdenum Wires Materials for Z-pinch;
高温高密度等离子体箍缩用钼丝材料研究
Particle Simulation Research on the Interaction of Ultra-short Ultra-intense Laser Pulses and Overdense Plasmas
超短超强激光脉冲与高密度等离子体相互作用的粒子模拟研究
Study on Measurement of Radio Emission from Interplanetary High Density Plasma Clouds Induced by ICMEs;
ICMEs导致的行星际高密度等离子体云射电辐射测量方法
super-dense high temperature plasma diagnostics
超高密度高温等离子体诊断
variable plasma density region
等离子体密度可变区
Influence of the Multipole Effects to the Opacity of Hot and Dense Plasmas;
高温稠密等离子体辐射不透明度的多极效应
Progress of Surface Modification for Ceramic Cutting Tools by Pulsed High Energy Density Plasma
脉冲高能量密度等离子体陶瓷刀具表面改性研究进展
Differential Laser Interferometry for Dense Plasma Density Measurement;
激光差分干涉测量稠密等离子体密度技术研究
Stability Studies for Fast Electron Beams in Dense Plasmas
超临界密度等离子体中快电子束稳定性的研究
The Development of Plasma Electron Density Diagnostic System on J-TEXT
J-TEXT等离子体电子密度诊断系统的建立
Laser Electron Accelerator in Plasma with Adiabatically Attenulating Density of Different Modes
不同等离子体密度绝热减稀模式加速电子
Plasma Electron Density Measuring and Processing Algorithm Design in EAST Tokamak
EAST等离子体电子密度测量与处理算法设计
Investigation in Electron Acceleration by Laser Wakefield on Density Attenuating Plasma
密度减稀等离子体中激光尾场加速电子研究
The arc source produces the arc discharging of cold cathode so that metal plasma is formed and it supplies the high density of metal ion current.
弧源因 产生冷阴极弧光放电而产生金属等离子体,形成高密度的金属离子流。
THE SURFACE MODIFICATION OF LDPE BY LOW TEMPERATURE PLASMA
低温等离子体对低密度聚乙烯材料的表面改性
Electric field structure and density profile in the stationary laser plasma
稳态激光等离子体中的电场结构及其密度分布
Experimental and Density Functional Theory Study on Plasma Methane Conversion;
等离子体转化甲烷之实验与密度泛函理论研究
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