In order to use liquid crystal light valve (LCLV) arrays to control exposure, the research has been carried out based on operating principles of LCLV and control theories of photolithography shutter, the control circuit of LCLV arrays has been designed.
通过分析光刻快门的控制原理及结合液晶光阀的工作原理,对液晶光阀组的控制进行了研究并给出了其控制电路图,该控制系统采用DS75451与门模块对液晶光阀组进行驱动,通过AT89C51单片机控制液晶光阀组的亮暗,实现了对液晶光阀组的控制,起到光刻快门的作用。
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