On the basis of optical interferometry measurement principle,the phase-shift error,camera error and optical error were analyzed and the optical error was confirmed to be the main error source and the focus axial error of the objective on the reference arm is the main causation that causes the conicoid error.
根据光学干涉系统的测量原理,分别对林尼克结构干涉测量系统的相移器误差、摄像机误差和光学系统误差进行了分析,确定光学系统误差是干涉测量系统的主要误差源,其中显微物镜焦点轴向误差是产生系统测量误差曲面的主要原因。
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