The microoptical scanner consisted of a positive microlens array and a negative microlens array and a PZT actuator was designed,which works in middle and short-wavelength infrared light and visible light.
设计了由正负微透镜阵列和压电陶瓷驱动器组成的微型光扫描器,它工作于中、短波红外光及可见光等波段,微透镜阵列规模为256×256元、单元直径为50μm,扫描视场角约为6。
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